JPS5159047U - - Google Patents

Info

Publication number
JPS5159047U
JPS5159047U JP13168474U JP13168474U JPS5159047U JP S5159047 U JPS5159047 U JP S5159047U JP 13168474 U JP13168474 U JP 13168474U JP 13168474 U JP13168474 U JP 13168474U JP S5159047 U JPS5159047 U JP S5159047U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13168474U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13168474U priority Critical patent/JPS5159047U/ja
Publication of JPS5159047U publication Critical patent/JPS5159047U/ja
Pending legal-status Critical Current

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  • Pallets (AREA)
JP13168474U 1974-11-01 1974-11-01 Pending JPS5159047U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13168474U JPS5159047U (en]) 1974-11-01 1974-11-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13168474U JPS5159047U (en]) 1974-11-01 1974-11-01

Publications (1)

Publication Number Publication Date
JPS5159047U true JPS5159047U (en]) 1976-05-10

Family

ID=28393497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13168474U Pending JPS5159047U (en]) 1974-11-01 1974-11-01

Country Status (1)

Country Link
JP (1) JPS5159047U (en])

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816523A (ja) * 1981-07-23 1983-01-31 Shimada Phys & Chem Ind Co Ltd 半導体気相成長装置
JPS59133529U (ja) * 1983-02-25 1984-09-06 株式会社ナブコ 歯止め装置
JPH0462622U (en]) * 1990-10-09 1992-05-28

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5816523A (ja) * 1981-07-23 1983-01-31 Shimada Phys & Chem Ind Co Ltd 半導体気相成長装置
JPS59133529U (ja) * 1983-02-25 1984-09-06 株式会社ナブコ 歯止め装置
JPH0462622U (en]) * 1990-10-09 1992-05-28

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